Facilities

ITN’s 50,000 sq. ft. facilities encompass two custom designed buildings located in Littleton, CO. ITN has its own in-house equipment design, fabrication, and testing capabilities. These include:
  • Static and roll-to-roll deposition (vacuum and non-vacuum)
  • Pin-hole free single layers to multiple layer depositions
  • Unpatterned depositions
  • Patterned depositions
    • Macro registered masks
    • Laser scribing and ink jet filling
    • Optical lithography
    • E-beam lithography (as small as 20nm feature size)
  • Measurement/characterization/process control
    • In-situ (OES, AAS, XRF, XRD, PDSE, QCM)
    • Ex-situ (XRF, PDSE, Dektek (thickness), SEM, IV Characterization)
  • Multiple vacuum deposition chambers supporting:
    • Sputtering (cathode arc, RF magnetron, direct current magnetron)
    • Chemical vapor deposition (CVD) and plasma enhanced CVD (PEVCD)
    • Atmospheric pressure CVD (APCVD)
    • Evaporative deposition (resistive, e-beam, ion-beam, ion-assisted)
    • Atomic layer deposition (ALD)
    • Ion milling
    • Diamond-like carbon deposition
    • Chemical spray deposition on a roll-to-roll basis
  • Ceramic processing capability (fuel cell lab)
  • Wet chemical lab
  • Spray deposition capability
  • Intelligent process control tools and analytical software
  • A fully-equipped machine shop
  • Clean room (class 10k)
  • Dry room