ITN’s 50,000 sq. ft. facilities encompass two custom
designed buildings located in Littleton, CO. ITN has
its own in-house equipment design, fabrication, and testing
capabilities. These include:
Static and roll-to-roll deposition (vacuum and non-vacuum)
Pin-hole free single layers to multiple layer depositions
Unpatterned depositions
Patterned depositions
Macro registered masks
Laser scribing and ink jet filling
Optical lithography
E-beam lithography (as small as 20nm feature size)
Measurement/characterization/process control
In-situ (OES, AAS, XRF, XRD, PDSE, QCM)
Ex-situ (XRF, PDSE, Dektek (thickness), SEM, IV Characterization)
Multiple vacuum deposition chambers supporting:
Sputtering (cathode arc, RF magnetron, direct current magnetron)
Chemical vapor deposition (CVD) and plasma enhanced CVD (PEVCD)